Specific Process Knowledge/Etch/DRIE-Pegasus/processB: Difference between revisions
| Line 107: | Line 107: | ||
| 2 | | 2 | ||
| Travka 05 | | Travka 05 | ||
| 17 cycles | | 17 cycles, 3:07 mins | ||
|- | |- | ||
| 3 | | 3 | ||
| Travka 05 | | Travka 05 | ||
| 34 cycles | | 34 cycles, 6:14 mins | ||
|- | |- | ||
| 5 | | 5 | ||
| Travka 10 | | Travka 10 | ||
| 17 cycles | | 17 cycles, 3:07 mins | ||
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| 6 | | 6 | ||
| Travka 10 | | Travka 10 | ||
| 34 cycles | | 34 cycles, 6:14 mins | ||
|- | |- | ||
| 8 | | 8 | ||
| Travka 20 | | Travka 20 | ||
| 17 cycles | | 17 cycles, 3:07 mins | ||
|- | |- | ||
| 9 | | 9 | ||
| Travka 20 | | Travka 20 | ||
| 34 cycles | | 34 cycles, 6:14 mins | ||
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| STYLE="vertical-align: top"| | | STYLE="vertical-align: top"| | ||
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| 11 | | 11 | ||
| Travka 35 | | Travka 35 | ||
| 17 cycles | | 17 cycles, 3:07 mins | ||
|- | |- | ||
| 12 | | 12 | ||
| Travka 35 | | Travka 35 | ||
| 34 cycles | | 34 cycles, 6:14 mins | ||
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| 14 | | 14 | ||
| Travka 50 | | Travka 50 | ||
| 17 cycles | | 17 cycles, 3:07 mins | ||
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| 15 | | 15 | ||
| Travka 50 | | Travka 50 | ||
| 34 cycles | | 34 cycles, 6:14 mins | ||
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| 17 | | 17 | ||
| Travka 65 | | Travka 65 | ||
| 17 cycles | | 17 cycles, 3:07 mins | ||
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| 18 | | 18 | ||
| Travka 65 | | Travka 65 | ||
| 34 cycles | | 34 cycles, 6:14 mins | ||
|} | |} | ||
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