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Specific Process Knowledge/Etch/DRIE-Pegasus/processB: Difference between revisions

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Bureaucrats, danchip, Administrators
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Bureaucrats, danchip, Administrators
1,918 edits
Line 98: Line 98:
{|
{|
| STYLE="vertical-align: top"|
| STYLE="vertical-align: top"|
{| border = 0
{| border = 1
|+ '''Wafers'''
|+ '''Wafers'''
|-
|-
! width="50" |Wafer number
! width="100" |Wafer number
! width="50" |Mask
! width="100" |Mask
! width="50" |Process B duration
! width="100" |Process B duration
|-
|-
| 2
| 2
Line 133: Line 133:
|+ '''Wafers'''
|+ '''Wafers'''
|-
|-
! width="50" |Wafer number
! width="100" |Wafer number
! width="50" |Mask
! width="100" |Mask
! width="50" |Process B duration
! width="100" |Process B duration
|-
|-
| 11
| 11
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