Specific Process Knowledge/Etch/DRIE-Pegasus/processB: Difference between revisions
| Line 129: | Line 129: | ||
| 34 cycles or 6:14 mins | | 34 cycles or 6:14 mins | ||
|} | |} | ||
| STYLE="vertical-align: top"| | |||
{| border = 1 | |||
|+ '''Wafers''' | |+ '''Wafers''' | ||
|- | |- | ||
| Line 159: | Line 161: | ||
| 34 cycles or 6:14 mins | | 34 cycles or 6:14 mins | ||
|} | |} | ||
| | |} | ||