Jump to content

Specific Process Knowledge/Etch/ASE (Advanced Silicon Etch): Difference between revisions

Jml (talk | contribs)
No edit summary
Jml (talk | contribs)
No edit summary
Line 8: Line 8:
! Parameter
! Parameter
! Etch
! Etch
! Pass
! Passivation
|-
|-
! Temperature  
! Temperature