Specific Process Knowledge/Etch/ICP Metal Etcher: Difference between revisions
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==Process information== | ==Process information== | ||
'''Standard recipes''' | |||
*[[Specific Process Knowledge/Etch/ICP Metal Etcher/Aluminium|Etch of aluminium]] | *[[Specific Process Knowledge/Etch/ICP Metal Etcher/Aluminium|Etch of aluminium]] | ||
*[[Specific Process Knowledge/Etch/ICP Metal Etcher/Titanium|Etch of titanium]] | *[[Specific Process Knowledge/Etch/ICP Metal Etcher/Titanium|Etch of titanium]] | ||
*[[Specific Process Knowledge/Etch/ICP Metal Etcher/Chromium|Etch of chromium]] | *[[Specific Process Knowledge/Etch/ICP Metal Etcher/Chromium|Etch of chromium]] | ||
'''Other etch recipes''' | |||
*[[Specific Process Knowledge/Etch/ICP Metal Etcher/silicon|Etch of silicon]] | |||
*[[Specific Process Knowledge/Etch/ICP Metal Etcher/silicon|Etch of silicon]] | *[[Specific Process Knowledge/Etch/ICP Metal Etcher/silicon|Etch of silicon]] | ||