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Specific Process Knowledge/Etch/ASE (Advanced Silicon Etch): Difference between revisions

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Line 11: Line 11:
|-
|-
| Temperature  
| Temperature  
| 10<sup>0</sup>C
| 10<sup>o</sup>C
| SF<sub>6</sub> Flow
| SF<sub>6</sub> Flow
| 230 sccm
| 230 sccm
| 0 sccm
| 0 sccm
|-
|-
| E
| No. of cycles
| rowspan="2" colspan="2" align="center"| F
| 31
|-  
| O<sub>2</sub> Flow
| G <!-- column 2+3 occupied by cell F -->
| 23 sccm
|-
| 0 sccm
| colspan="3" align="center"| H
|-
| Process time
| 5:56 mins
| C<sub>4</sub>F<sub>4</sub> Flow
| 0 sccm
| 120 sccm
|-
|}
|}


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