Specific Process Knowledge/Characterization/SEM: Scanning Electron Microscopy: Difference between revisions
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* 20 nm (limited by instrument) | * 20 nm (limited by instrument) | ||
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!style="background:silver; color:black" align="center" valign="center" rowspan="4"|Instrument | !style="background:silver; color:black" align="center" valign="center" rowspan="4"|Instrument specifics | ||
|style="background:LightGrey; color:black"|Detectors | |style="background:LightGrey; color:black"|Detectors | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||