Specific Process Knowledge/Etch/RIE (Reactive Ion Etch): Difference between revisions
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== Etching using the dry etch technique RIE (Reactive Ion Etch) == | == Etching using the dry etch technique RIE (Reactive Ion Etch) == | ||
[[image:Cluster1a.jpg|200x200px|right|thumb|RIE1 (part of cluster1) - positioned in cleanroom2]] | [[image:Cluster1a.jpg|200x200px|right|thumb|RIE1 (part of cluster1) - positioned in cleanroom2]] | ||