Specific Process Knowledge/Characterization/SEM: Scanning Electron Microscopy: Difference between revisions

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==[[/FEI | FEI SEM]] - ''FEI Nova 600 NanoSEM''==
==[[/FEI | FEI SEM]] - ''FEI Nova 600 NanoSEM''==


=LEO SEM=
==[[/LEO | Leo SEM]] - ''Leo 1550 '' ==
=JEOL SEM=
 
==[[/JEOL | Jeol SEM]] - ''Jeol JSM 5500 LV '' ==

Revision as of 16:17, 24 November 2007

At the moment we have three SEM's. Together they cover a wide range of needs in the cleanroom: From the fast in-process verification of different process parameters such as etch rates, step coverages or lift-off quality to the ultra high resolution images on any type of sample intended for publication.

FEI SEM - FEI Nova 600 NanoSEM

Leo SEM - Leo 1550

Jeol SEM - Jeol JSM 5500 LV

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