Specific Process Knowledge/Imprinting: Difference between revisions
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== Choose an equipment == | == Choose an equipment == | ||
*MVD - ''Molecular Vapor Deposition - Antistiction coater for silicon stamps'' | *MVD - ''Molecular Vapor Deposition - Antistiction coater for silicon stamps'' | ||
*Drop Shape Analyzer | *Drop Shape Analyzer - ''Tool to measure the hydrofobisity of the antistiction layer'' | ||
*EVG NIL - ''Aligner and imprinting tool'' | *EVG NIL - ''Aligner and imprinting tool'' | ||
*Thyra - ''Home build imprinting tool'' | *Thyra - ''Home build imprinting tool'' | ||
Revision as of 10:52, 2 October 2007
Choose an equipment
- MVD - Molecular Vapor Deposition - Antistiction coater for silicon stamps
- Drop Shape Analyzer - Tool to measure the hydrofobisity of the antistiction layer
- EVG NIL - Aligner and imprinting tool
- Thyra - Home build imprinting tool