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Specific Process Knowledge/Characterization/Topographic measurement: Difference between revisions

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|Max. aspect ratio
|Max. scan depth [µm] (as a function of trench width W)
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|0.87(W[µm]-5µm)
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|1.2(W[µm]-5µm)
|~1 with standard cantilever.
|~1 with standard cantilever.
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