Specific Process Knowledge/Characterization/Topographic measurement: Difference between revisions
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|Resolution xy | |Resolution xy | ||
|up to 5900 data points per profile | |up to 5900 data points per profile | ||
| | |down to 0.067 µm | ||
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|- | |- | ||
|Resolution z | |Resolution z | ||
|1 or 25Å | |1 or 25Å | ||
| | |1Å to 20Å | ||
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|- | |- | ||