Specific Process Knowledge/Etch/Wet Silicon Oxide Etch (BHF): Difference between revisions
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*Blue film | *Blue film | ||
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In beaker or PP-bath in the fume hood in cleanroom 2: | In '''plastic''' beaker or PP-bath in the fume hood in cleanroom 2: | ||
*Photoresist | *Photoresist | ||
*Silicon nitride | *Silicon nitride | ||