Specific Process Knowledge/Characterization/Topographic measurement: Difference between revisions
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|Max. scan range z | |Max. scan range z | ||
| | |<100Å to~0.3mm | ||
|50Å to 262µm | |50Å to 262µm | ||
|1 µm (can go up to 5 µm under special settings) | |1 µm (can go up to 5 µm under special settings) | ||