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Specific Process Knowledge/Characterization/Topographic measurement: Difference between revisions

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Line 18: Line 18:
|-
|-
|Substrate size
|Substrate size
|4" or less
|4"
|8" or less
|2" -> 8"
|6" or less
|6" or less
|-
|-
Line 56: Line 56:
|5 µm
|5 µm
|<12 nm on standard cantilever
|<12 nm on standard cantilever
|-
|Stress measurement
|Can be done
|Can be done
|Cannot be done
|-
|Surface roughness
|Can be done on a line scan
|Can be done on a line scan
|Can be done on a selected surface area
|-  
|-  
|}
|}
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