Specific Process Knowledge/Characterization/SEM: Scanning Electron Microscopy: Difference between revisions
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!style="background:silver; color:black" align="center" valign="center" rowspan="3"|Performance | !style="background:silver; color:black" align="center" valign="center" rowspan="3"|Performance | ||
|style="background:LightGrey; color:black" rowspan="2"|Resolution | |style="background:LightGrey; color:black" rowspan="2"|Resolution | ||
|style="background: | |style="background:Whitesmoke; color:black" colspan="4" | The resolution of a SEM is strongly dependent on the type of sample and the operator skills. | ||
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|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
* ~ 5 nanometers (limited by vibrations) | * ~ 5 nanometers (limited by vibrations) | ||