Specific Process Knowledge/Etch/DRIE-Pegasus: Difference between revisions
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'''Important information''' | '''Important information''' | ||
In August 2011 we introduced a new set of rules regarding the loading of wafers. | In August 2011 we introduced a new set of rules regarding the loading of wafers. If you were trained prior to this, you can find more information | ||
[[Specific_Process_Knowledge/Etch/DRIE-Pegasus/Waferloading|here]]. | [[Specific_Process_Knowledge/Etch/DRIE-Pegasus/Waferloading|here]]. | ||