Specific Process Knowledge/Etch/DRIE-Pegasus: Difference between revisions
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|style="background:WhiteSmoke; color:black"|<b>DRIE-Pegasus</b> | |style="background:WhiteSmoke; color:black"|<b>DRIE-Pegasus</b> | ||
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!style="background:silver; color:black;" align="center" width=" | !style="background:silver; color:black;" align="center" width="80"|Purpose | ||
|style="background:LightGrey; color:black"| Dry etch of | |style="background:LightGrey; color:black"| Dry etch of | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||