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![[Specific Process Knowledge/Etch/ICP Metal Etcher/silicon/nano/Sinan331|3.31]]
![[Specific Process Knowledge/Etch/ICP Metal Etcher/silicon/nano/Sinan331|3.31]]
![[Specific Process Knowledge/Etch/ICP Metal Etcher/silicon/nano/Sinan331-2|3.31]]
![[Specific Process Knowledge/Etch/ICP Metal Etcher/silicon/nano/Sinan331-2|3.31]]
![[Specific Process Knowledge/Etch/ICP Metal Etcher/Sinan332|3.32]]
![[Specific Process Knowledge/Etch/ICP Metal Etcher/silicon/nano/Sinan332|3.32]]
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!Cl<sub>2</sub> (sccm)
!Cl<sub>2</sub> (sccm)
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