Specific Process Knowledge/Etch/ICP Metal Etcher/silicon/nano: Difference between revisions

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	=== Etching of nanostructures in silicon ===		== Etching of nanostructures in silicon ==

	A series of experiments with etching nanostructures in silicon has been carried out. The common process parameters are:		A series of experiments with etching nanostructures in silicon has been carried out. The common process parameters are: