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| == Recipes on the Metal Etcher == | | == Recipes on the Metal Etcher == |
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| === Aluminium etch ===
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| The aluminium etch has two steps:
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| ; Breakthrough
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| : The breakthrough step is designed to break through the native aluminium oxide layer that is present on all aluminium surfaces. The duration of this step should remain fixed.
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| ; Main
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| : The main step etches bulk aluminium.
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| {| border="2" cellpadding="2" cellspacing="1" style="text-align:center;"
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| |+ '''Al etch'''
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| |-
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| ! rowspan="2" | Parameter
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| ! colspan="2" | Process step
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| |-
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| ! width="200" | Breakthrough
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| ! width="200" | Main
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| |-
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| ! Time (secs)
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| | 20
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| | 40 (variable)
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| |-
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| ! HBr (sccm)
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| | -
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| | 15
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| |-
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| ! Cl<sub>2</sub> (sccm)
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| | 20
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| | 25
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| |-
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| ! Pressure (mTorr)
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| | 2, Strike 3 secs @ 15 mTorr???
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| | 1
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| |-
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| ! Coil power (W)
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| | 600
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| | 500
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| |-
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| ! Platen power (W)
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| | 125
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| | 100
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| |-
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| ! Temperature (<sup>o</sup>C)
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| | 20
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| | 20
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| |-
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| ! Spacers (mm)
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| | 30
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| | 30
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| |-
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| |}
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| ===Chromium etch=== | | ===Chromium etch=== |
