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| Line 124: |
Line 124: |
| |- | | |- |
| |} | | |} |
|
| |
| === Titanium etch ===
| |
|
| |
|
| |
| {| border="2" cellpadding="2" cellspacing="1" style="text-align:center;"
| |
| |+ '''Ti etch'''
| |
| |-
| |
| ! Parameter
| |
| ! width="200" | Process 1
| |
| ! width="200" | Process 2
| |
| |-
| |
| ! Cl<sub>2</sub> (sccm)
| |
| | 30
| |
| | 30
| |
| |-
| |
| ! HBr (sccm)
| |
| | -
| |
| | -
| |
| |-
| |
| ! Pressure (mTorr)
| |
| | 3, Strike 3 secs @ 15 mTorr???
| |
| | 3
| |
| |-
| |
| ! Coil power (W)
| |
| | 800
| |
| | 900
| |
| |-
| |
| ! Platen power (W)
| |
| | 100
| |
| | 50
| |
| |-
| |
| ! Temperature (<sup>o</sup>C)
| |
| | 20
| |
| | 20
| |
| |-
| |
| ! Spacers (mm)
| |
| | 30
| |
| | 30
| |
| |-
| |
| ! Etch rate (nm/min)
| |
| | 152
| |
| | 64
| |
| |-
| |
| !AZ resist selectivity
| |
| | 0.67
| |
| | 0.83
| |
| |-
| |
| |}
| |
|
| |
|
| |
|
| ===Chromium etch=== | | ===Chromium etch=== |
