Specific Process Knowledge/Etch/DRIE-Pegasus/Notation: Difference between revisions
| Line 14: | Line 14: | ||
|- | |- | ||
! | ! | ||
| colspan="2" | Step 1 | |||
| colspan="2" | Step 2 | |||
|- | |- | ||
| width="120" | Parameter | |||
| width="120" | Etch | |||
| width="120" | Dep | |||
| width="120" | Etch | |||
| width="120" | Dep | |||
|- | |- | ||
| Gas flow (sccm) | |||
| SF<sub>6</sub> 350 (1.5 s) 550 | | SF<sub>6</sub> 350 (1.5 s) 550 | ||
| C<sub>4</sub>F<sub>8</sub> 200 | | C<sub>4</sub>F<sub>8</sub> 200 | ||
| Line 29: | Line 29: | ||
| C<sub>4</sub>F<sub>8</sub> 200 | | C<sub>4</sub>F<sub>8</sub> 200 | ||
|- | |- | ||
| Cycle time (secs) | |||
| 7.0 | | 7.0 | ||
| 4.0 | | 4.0 | ||
| Line 35: | Line 35: | ||
| 4.0 | | 4.0 | ||
|- | |- | ||
| Pressure (mtorr) | |||
! '''25 (1.5 s) 90 >> 150''' | |||
| 25 | | 25 | ||
| 25 (1.5 s) 150 | | 25 (1.5 s) 150 | ||
| 25 | | 25 | ||
|- | |- | ||
| Coil power (W) | |||
| 2800 | | 2800 | ||
| 2000 | | 2000 | ||
| Line 47: | Line 47: | ||
| 2000 | | 2000 | ||
|- | |- | ||
| Platen power (W) | |||
! '''120 >> 140 (1.5) 45''' | |||
| 0 | | 0 | ||
| 140 (1.5) 45 | | 140 (1.5) 45 | ||
| 0 | | 0 | ||
|- | |- | ||
| Cycles | |||
| colspan="2" | 11 (keep fixed) | | colspan="2" | 11 (keep fixed) | ||
| colspan="2" | 44 (vary this) | | colspan="2" | 44 (vary this) | ||
|- | |- | ||
| Common | |||
| colspan="4" | Temperature 20 degs, HBC 10 torr, Short funnel, with baffle & 5mm spacers | | colspan="4" | Temperature 20 degs, HBC 10 torr, Short funnel, with baffle & 5mm spacers | ||
|} | |} | ||