Specific Process Knowledge/Characterization/SEM: Scanning Electron Microscopy: Difference between revisions
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* Z: 48 mm | * Z: 48 mm | ||
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* X, Y: 130 | * X, Y: 130 × 130 mm | ||
* T: -4 to 70<sup>o</sup> | * T: -4 to 70<sup>o</sup> | ||
* R: 360<sup>o</sup> | * R: 360<sup>o</sup> | ||
* Z: 50 mm | * Z: 50 mm | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
* X, Y: 150 | * X, Y: 150 × 150 mm | ||
* T: -10 to 60<sup>o</sup> | * T: -10 to 60<sup>o</sup> | ||
* R: 360<sup>o</sup> | * R: 360<sup>o</sup> | ||
* Z: 10 mm | * Z: 10 mm | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
* X, Y: 73 | * X, Y: 73 × 40 mm | ||
* T: -10 to 90<sup>o</sup> | * T: -10 to 90<sup>o</sup> | ||
* R: 360<sup>o</sup> | * R: 360<sup>o</sup> | ||
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|style="background:LightGrey; color:black"|Operating pressures | |style="background:LightGrey; color:black"|Operating pressures | ||
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* High vacuum (2 | * High vacuum (2 × 10<sup>-5</sup>mbar - 10<sup>-6</sup>mbar) | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
* High vacuum (2 | * High vacuum (2 × 10<sup>-4</sup>mbar - 10<sup>-6</sup>mbar) | ||
* Low vacuum (0.1 mbar-2 mbar) | * Low vacuum (0.1 mbar-2 mbar) | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
* High vacuum (2 | * High vacuum (2 × 10<sup>-4</sup>mbar - 10<sup>-6</sup>mbar) | ||
* Low vacuum (0.1 mbar-2 mbar) | * Low vacuum (0.1 mbar-2 mbar) | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||