Specific Process Knowledge/Thermal Process/Furnace Noble: Difference between revisions
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[[Image:Noble.JPG|thumb|300x300px|A1 Bor Drive-in furnace. Positioned in cleanroom 2]] | [[Image:Noble.JPG|thumb|300x300px|A1 Bor Drive-in furnace. Positioned in cleanroom 2]] | ||
'''The user manual, technical information and contact information can be found in LabManager:''' | |||
'''[http://www.labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=150 Furnace: Noble]''' | |||
==Overview of the performance of the Noble Furnace== | ==Overview of the performance of the Noble Furnace== | ||