Specific Process Knowledge/Thermal Process/Furnace Noble: Difference between revisions
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This furnace is used to grow oxide on metals or dirty wafers and to anneal wafers up to 1000 degree Celsius. | This furnace is used to grow oxide on metals or dirty wafers and to anneal wafers up to 1000 degree Celsius. | ||
The Noble Furnace is located in service room 3. | The Noble Furnace is located in service room 3. | ||
[[Image:Noble.JPG|thumb|300x300px|A1 Bor Drive-in furnace. Positioned in cleanroom 2]] | |||
==Overview of the performance of the Noble Furnace== | ==Overview of the performance of the Noble Furnace== | ||