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| {| border="2" cellspacing="0" cellpadding="4" align="center" | | {| border="2" cellspacing="0" cellpadding="4" align="center" |
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| |Leo 1550 SEM | | |Leo 1550 SEM |
| |Jeol JSM 5500 LV SEM | | |Jeol JSM 5500 LV SEM |
| |-
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| !Electron emitter type
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| |FEG (Field Emission Gun)
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| |FEG (Field Emission Gun)
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| |FEG (Field Emission Gun)
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| |Tungsten filament
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| |-
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| !Vacuum modes
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| |High vacuum (>2*10<math>^{-4}</math>mbar) and Low vacuum (0.1-1.9 mbar)
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| |High vacuum (>2*10<math>^{-5}</math>mbar)
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| |High vacuum and Low vacuum
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| |-
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| !Detectors
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| |
| |
| |High and Low vacuum detectors of SE and BSE electrons, HiVac Inlens SE detector and high resolution Low vacuum detector
| |
| |SE, Inlens SE and BSE detectors
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| |High vacuum SE and BSE detector
| |
| |- | | |- |
| !Substrate size | | !Substrate size |
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| | | | | |
| | | | | |
| |-
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| !Best obtainable lateral resolution (strongly dependent on user skills and sample type)
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| |Down to 1-2 nm (Limiting factor: Beam)
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| |Down to 10 nm (Limiting factor: Vibrations)
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| |Down to 20-30 nm (Limiting factor: Vibrations)
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| |-
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| !General availability
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| |
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| |Good
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| |Poor
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| |Excellent
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| |-
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| !Ease of use
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| |
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| |A sophisticated user interface with many features and many different detectors: Complicated
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| |A simple user interface with joystick and a limited number of detectors: Relatively simple
| |
| |A simple user interface with joystick with one detector: Very simple
| |
| |-
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| !User level access
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| |
| |
| |Only experienced SEM users, masters/Ph.D students with special needs will be trained
| |
| |Any cleanroom user
| |
| |Any cleanroom user
| |
| |-
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| !Best usage
| |
| |
| |
| |High resolution imaging of any sample
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| |High resolution imaging of any non-polymer sample
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| |Fast in-process imaging
| |
| |- | | |- |
| !EDX analysis | | !EDX analysis |
