Specific Process Knowledge/Thermal Process/Resist Pyrolysis Furnace: Difference between revisions
| Line 54: | Line 54: | ||
*Silicon oxide | *Silicon oxide | ||
*Silicon nitride | *Silicon nitride | ||
*Polysilicon | |||
*Quartz | *Quartz | ||
*AZ resist (prebaked) | *AZ resist (prebaked) | ||