Specific Process Knowledge/Characterization/Profiler: Difference between revisions
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*Surface roughness on a line scan | *Surface roughness on a line scan | ||
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!style="background:silver; color:black" align="left"|Performance | !style="background:silver; color:black" align="left" rowspan="5" valign="top" |Performance | ||
|style="background:LightGrey; color:black"|Scan range xy||style="background:WhiteSmoke; color:black"| | |style="background:LightGrey; color:black"|Scan range xy||style="background:WhiteSmoke; color:black"| | ||
Line scan x: 50 µm to 100 mm | Line scan x: 50 µm to 100 mm | ||
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|style="background:LightGrey; color:black"|Scan range z | |style="background:LightGrey; color:black"|Scan range z | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
50 Å to 1 mm | 50 Å to 1 mm | ||
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|style="background:LightGrey; color:black"|Resolution xy | |style="background:LightGrey; color:black"|Resolution xy | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
down to 0.067 µm | down to 0.067 µm | ||
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|style="background:LightGrey; color:black"|Resolution z | |style="background:LightGrey; color:black"|Resolution z | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
1Å, 10Å, 40Å or 160Å (for ranges 65kÅ, 655 kÅ, 2620 kÅ and 1mm respectively) | 1Å, 10Å, 40Å or 160Å (for ranges 65kÅ, 655 kÅ, 2620 kÅ and 1mm respectively) | ||
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|style="background:LightGrey; color:black"|Max. scan depth as a function of trench width W | |style="background:LightGrey; color:black"|Max. scan depth as a function of trench width W | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
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*5 µm 45<sup>o</sup> cone | *5 µm 45<sup>o</sup> cone | ||
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!style="background:silver; color:black" align="left"| | !style="background:silver; color:black" align="left" rowspan="2" valign="top" |Performance | ||
|style="background:LightGrey; color:black"|Substrate size | |style="background:LightGrey; color:black"|Substrate size | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
*up to 8" | *up to 8" | ||
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| style="background:LightGrey; color:black"|Substrate material allowed | | style="background:LightGrey; color:black"|Substrate material allowed | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||