Specific Process Knowledge/Etch/DRIE-Pegasus: Difference between revisions
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*Purpose 1 | *Purpose 1 | ||
*Purpose 2 | *Purpose 2 | ||
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!style="background:silver; color:black" align="center" valign="center" rowspan="2"|Performance | !style="background:silver; color:black" align="center" valign="center" rowspan="2"|Performance | ||
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*Performance range 1 | *Performance range 1 | ||
*Performance range 2 | *Performance range 2 | ||
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|style="background:LightGrey; color:black"|Response 2 | |style="background:LightGrey; color:black"|Response 2 | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
*Performance range | *Performance range | ||
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!style="background:silver; color:black" align="center" valign="center" rowspan="2"|Process parameter range | !style="background:silver; color:black" align="center" valign="center" rowspan="2"|Process parameter range | ||
|style="background:LightGrey; color:black"|Parameter 1 | |style="background:LightGrey; color:black"|Parameter 1 | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
*Range | *Range | ||
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|style="background:LightGrey; color:black"|Parameter 2 | |style="background:LightGrey; color:black"|Parameter 2 | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
*Range | *Range | ||
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*<nowiki>#</nowiki> 100 mm wafers | *<nowiki>#</nowiki> 100 mm wafers | ||
*<nowiki>#</nowiki> 150 mm wafers | *<nowiki>#</nowiki> 150 mm wafers | ||
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| style="background:LightGrey; color:black"|Allowed materials | | style="background:LightGrey; color:black"|Allowed materials | ||
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*Allowed material 1 | *Allowed material 1 | ||
*Allowed material 2 | *Allowed material 2 | ||
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|} | |} | ||