Specific Process Knowledge/Characterization/Four-Point Probe

Four-Point Probe

The four-Point Probe is used to make I/V measurement for resistance and resistivity measurement. But can also be used to find thickness of thin layers or test if is a N- or P-type wafer.

The four pins are pushed on the surface and a measurement is performed. It works only for 4" wafers because a special holder is need.

Four point probe: positioned in cleanroom 4

The user manual,technical information and contact information can be found in LabManager:

Four point probe