Specific Process Knowledge/Thin film deposition/Furnace LPCVD Nitride: Difference between revisions
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Please take a look at the process side to get more information about deposition of silicon nitride using an LPCVD furnace: | Please take a look at the process side to get more information about deposition of silicon nitride using an LPCVD furnace: | ||
[[Specific Process Knowledge/Thin film deposition/Deposition of Silicon Nitride/Deposition of Silicon Nitride using LPCVD|Deposition of Silicon Nitride using LPCVD]] | [[Specific Process Knowledge/Thin film deposition/Deposition of Silicon Nitride/Deposition of Silicon Nitride using LPCVD|Deposition of Silicon Nitride using LPCVD]] | ||
==Overview of the performance of LPCVD Silicon Nitride and some process related parameters== | ==Overview of the performance of LPCVD Silicon Nitride and some process related parameters== | ||
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!style="background:silver; color:black;" align="left"|Purpose | !style="background:silver; color:black;" align="left"|Purpose | ||