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| == Technical specifcations == | | == Technical specifcations == |
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| =Sample requirements=
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| *The Nova NanoSEM analyzes a variety of samples, however, excluded are samples that may degas, disintegrate or produce dust/particles. Therefore, no wet polymers, powders etc. If you have any questions, please ask Jonas.
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| = Sample sizes=
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| *Up to 6" wafers.
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| = SEM modes =
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| * Mode 1: High Resolution SEM mode: This is the standard operation mode associated with SEM.
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| * Mode 2: Ultra High Resolution SEM mode: Magnetic fields generated in the chamber act as a virtual lens that engulfes the sample. Using this semi-immersion lens increased resolution may be achieved at high magnifications.
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| * Mode 3: EDX mode: Similar to Mode 1, but the electrons are trapped using a magnetic field.
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| = Lateral resolution=
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| The resolution that may be achieve is highly dependent on the type of sample and SEM operator skills. In the best cases one may expect:
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| * High Vacuum operation:
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| 1.0 nm at 15 kV (TLD detector and optimum working distance)
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| 1.8 nm at 1 kV (TLD detector and optimum working distance)
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| * Low Vacuum operation
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| 1.5 nm at 10 kV (Helix detector and optimum working distance)
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| 1.8 nm at 3 kV (Helix detector and optimum working distance)
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| = Acceleration voltage=
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| * 200 V - 30 kV
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| = Detectors=
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| * ETD: In chamber SE Detector (Everhardt Thornley Detector)
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| * TLD: Inlens SE detector (Through Lens Detector)
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| * BSED: BackScatter Electron Detector
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| * LVD: Low Vacuum SE Detector
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| * Helix: High resolution Low Vacuum detector
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| * GAD: Low Vacuum Backscatter Electron Detector (Gaseous Analytical Detector)
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| * EDX: Liquid nitrogen cooled detector of X-rays
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| = Stage=
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| The eucentric stage is centered in (x=0,y=0) and has eucentric point at WD 5 mm.
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| * X range: 150 mm
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| * Y range: 150 mm
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| * Z range: 10 mm
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| * Rotation: 360±
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| * Tilt range: -10 to 60 degrees.
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| = Vent and pumpdown time=
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| * Approximately 5 minutes combined.
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| = Accuracy and reproducibility=
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| * A standardization procedure will be introduced soon.
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| = Energy Dispersive X-ray analysis=
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| *Oxford Inca system installed for high performance EDX analysis.
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| = Micromanipulator=
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| *A Kleindiek micromanipulator with a Capres 4 point probe is installed.
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| ==LEO SEM== | | ==LEO SEM== |
| ==JEOL SEM== | | ==JEOL SEM== |
At the moment we have three SEM's.
FEI SEM
Technical specifcations
LEO SEM
JEOL SEM
