Specific Process Knowledge/Thermal Process/Furnace Noble: Difference between revisions
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*O<sub>2</sub>: 0-5 sccm | *O<sub>2</sub>: 0-5 sccm | ||
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!style="background:silver; color:black" align=" | !style="background:silver; color:black" align="center" valign="center" rowspan="2"|Substrates | ||
|style="background:LightGrey; color:black"|Batch size | |style="background:LightGrey; color:black"|Batch size | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||