Specific Process Knowledge/Thermal Process/C3 Anneal-bond furnace: Difference between revisions
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==C3 Furnace Anneal Bond== | ==C3 Furnace Anneal Bond== | ||
[[Image:C3.JPG|thumb|300x300px| | [[Image:C3.JPG|thumb|300x300px|C3 Furnace Anneal Bond: positioned in cleanroom 2]] | ||
C3 Furnace Anneal Bond is a Tempress horizontal furnace for oxidation and annealing of silicon wafers. | C3 Furnace Anneal Bond is a Tempress horizontal furnace for oxidation and annealing of silicon wafers. | ||