Specific Process Knowledge/Thermal Process/A4 Phosphor Pre-dep furnace: Difference between revisions
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==Overview of the performance of the Phosphor pre-dep furnace and some process related parameters== | ==Overview of the performance of the Phosphor pre-dep furnace and some process related parameters== | ||
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!style="background:silver; color:black;" align=" | !style="background:silver; color:black;" align="center"|Purpose | ||
|style="background:LightGrey; color:black"|Doping of Phosphor | |style="background:LightGrey; color:black"|Doping of Phosphor | ||
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!style="background:silver; color:black" align=" | !style="background:silver; color:black" align="center"|Performance | ||
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* | * | ||
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!style="background:silver; color:black" align=" | !style="background:silver; color:black" align="center" valign="center" rowspan="3"|Process parameter range | ||
|style="background:LightGrey; color:black"|Process Temperature | |style="background:LightGrey; color:black"|Process Temperature | ||
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*POCL<sub>3</sub> | *POCL<sub>3</sub> | ||
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!style="background:silver; color:black" align=" | !style="background:silver; color:black" align="center" valign="center" rowspan="2"|Substrates | ||
|style="background:LightGrey; color:black"|Batch size | |style="background:LightGrey; color:black"|Batch size | ||
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