Specific Process Knowledge/Thermal Process/A1 Bor Drive-in furnace: Difference between revisions
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A1 is the top furnace tube in the A-stack positioned in cleanroom 2. The A-stack together with furnace C2 are the cleanest of all our furnaces. Please be aware of which substrates are allowed to enter this furnace. Check [http://www.labmanager.danchip.dtu.dk/view_binary.php?fileId=1250 the cross contamination chart]. If you are in doubt, please send a mail to [mailto:furnace@danchip.dtu.dk the Furnace group]. | A1 is the top furnace tube in the A-stack positioned in cleanroom 2. The A-stack together with furnace C2 are the cleanest of all our furnaces. Please be aware of which substrates are allowed to enter this furnace. Check [http://www.labmanager.danchip.dtu.dk/view_binary.php?fileId=1250 the cross contamination chart]. If you are in doubt, please send a mail to [mailto:furnace@danchip.dtu.dk the Furnace group]. | ||
'''The user manual(s), quality control procedure(s) and results, user APV(s), technical information and contact information can be found in LabManager:''' | |||
'''[http://www.labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&page_id=169 Phosphor Drive-in]''' | |||
==Process knowledge== | ==Process knowledge== | ||