Specific Process Knowledge/Etch/ASE (Advanced Silicon Etch): Difference between revisions

@@ Line 33: / Line 33: @@
+{| border="1" cellpadding="5" cellspacing="0"
-|              ^ Heading 1            ^ Heading 2          ^
+|-
-^ Heading 3    | Row 1 Col 2          | Row 1 Col 3        |
+! Column 1 || Column 2 || Column 3
-^ Heading 4    | no colspan this time |                    |
+|-
-^ Heading 5    | Row 2 Col 2          | Row 2 Col 3        |
+| rowspan="2"| A
+| colspan="2" align="center"| B
+|-
+| C <!-- column 1 occupied by cell A -->
+| D
+|-
+| E
+| rowspan="2" colspan="2" align="center"| F
+|-
+| G <!-- column 2+3 occupied by cell F -->
+|-
+| colspan="3" align="center"| H
+|}