|
|
| Line 49: |
Line 49: |
|
| |
|
| *[[Specific Process Knowledge/Etch/DRIE-Pegasus/SPTSdocs|Hardware and process applications]] | | *[[Specific Process Knowledge/Etch/DRIE-Pegasus/SPTSdocs|Hardware and process applications]] |
|
| |
|
| |
| == SPTS documents on information ==
| |
|
| |
| [[Media:Pegasus_sheet_V8.pdf |Hardware Information - Overview]].
| |
|
| |
| [[Media:Pegasus_specification_v2.4.pdf|Hardware Information - Detailed]].
| |
|
| |
| [[Media:Pegasus_System_Description_&_Differentiation.pdf|The Advantages the Pegasus has over existing Si etchers]].
| |
|
| |
| [[Media:Macs_v2.pdf|Robot Handling System Information ]].
| |
|
| |
| == Process applications ==
| |
|
| |
| [[Media:Aerospace.pdf |MEMS in Aerospace]].
| |
|
| |
| [[Media:Bio-medical.pdf|Bio Medical]].
| |
|
| |
| [[Media:Energy.pdf|MEMS in Energy]].
| |
|
| |
| [[Media:Nanotechnology.pdf|Nanotechnology]].
| |
|
| |
| [[Media:Packaging-etch.pdf |Packaging Applications]].
| |
|
| |
| [[Media:Appl-sheets-4_markets.pdf|General Applications]].
| |
|
| |
|
| |
|
| Further info: | | Further info: |
|
| |
|
| [[Specific Process Knowledge/Etch/DRIE-Pegasus/FAQ|FAQ (Under construction)]] | | [[Specific Process Knowledge/Etch/DRIE-Pegasus/FAQ|FAQ (Under construction)]] |
