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Specific Process Knowledge/Etch/DRIE-Pegasus/SOIetch: Difference between revisions

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== SOI etch ==
The SOI etch uses the Low frequency (LF) platen generator to minimize the notching at buried stop layers such as the BOX layer in a SOI wafer.
{| border="2" cellpadding="2" cellspacing="1" style="text-align:center;"
{| border="2" cellpadding="2" cellspacing="1" style="text-align:center;"
|+ '''SOI etch specifications'''
|+ '''SOI etch specifications'''
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