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[[Image:DRIE-Pegasus.jpg |300x300px|thumb|The SPTS Pegasus in the Danchip cleanroom]]
[[Image:DRIE-Pegasus.jpg |300x300px|thumb|The SPTS Pegasus in the Danchip cleanroom]]


'''The Bosch process'''
The DRIE Pegasus is a state-of-art silicon dry etcher that offers outstanding performance in terms of etch rate, uniformity etc. It uses the so-called Bosch process to achieve excellent control of the etched features. Click [[Specific_Process_Knowledge/Etch/DRIE-Pegasus/System-description|here]] for more fundamental information of the system.
The DRIE Pegasus is a state-of-art silicon dry etcher that offers outstanding performance in terms of etch rate, uniformity etc. It uses the so-called Bosch process to achieve excellent control of the etched features. Click [[Specific_Process_Knowledge/Etch/DRIE-Pegasus/System-description|here]] for more fundamental information of the system.


'''User manuals etc.'''
The user manual, quality control procedure and the results may all be found on the [http://www.labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=265| DRIE-Pegasus LabManager] page.
The user manual, quality control procedure and the results may all be found on the [http://www.labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=265| DRIE-Pegasus LabManager] page.


'''Important information'''
In August 2011 we introduced a new set of rules regarding the loading of wafers. In you were trained prior to this, you can find more information  
In August 2011 we introduced a new set of rules regarding the loading of wafers. In you were trained prior to this, you can find more information  
[[Specific_Process_Knowledge/Etch/DRIE-Pegasus/Waferloading|here]].
[[Specific_Process_Knowledge/Etch/DRIE-Pegasus/Waferloading|here]].


'''Acceptance test'''
The instrument was opened for users in April 2010 when the acceptance test was signed. This was based on the performance of five standard recipes (A, B, C, D and SOI) that are further examined below. The acceptance test report is found [[Media:Pegasus_AcceptanceTest.pdf|here]].
The instrument was opened for users in April 2010 when the acceptance test was signed. This was based on the performance of five standard recipes (A, B, C, D and SOI) that are further examined below. The acceptance test report is found [[Media:Pegasus_AcceptanceTest.pdf|here]].


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