Specific Process Knowledge/Etch/ASE (Advanced Silicon Etch): Difference between revisions
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|+'''Shallolr''' | |+'''Shallolr''' | ||
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! | ! Process | ||
! | ! Parameter | ||
!! Phase | |||
Etch | |||
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| SF<sub>6</sub> flow | | SF<sub>6</sub> flow | ||