Specific Process Knowledge/Etch/DRIE-Pegasus/Notation: Difference between revisions
Created page with "== How to read the SPTS notation on process recipes == To understand the SPTS short hand notation on process recipes look at two examples from the etch cycle of step1 of the ..." |
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## In the first 1.5 seconds the pressure is constant at 25 mtorr. | ## In the first 1.5 seconds the pressure is constant at 25 mtorr. | ||
## During the remainder of the cycle the pressure has i higher value that is ramped from 90 initially to 150 mtorr in the last etch cycle. | ## During the remainder of the cycle the pressure has i higher value that is ramped from 90 initially to 150 mtorr in the last etch cycle. | ||
{| border="2" cellpadding="2" cellspacing="1" style="text-align:center;" | |||
|+ '''Process A recipe''' | |||
|- | |||
! | |||
! colspan="2" | Step 1 | |||
! colspan="2" | Step 2 | |||
|- | |||
! width="120" | Parameter | |||
! width="120" | Etch | |||
! width="120" | Dep | |||
! width="120" | Etch | |||
! width="120" | Dep | |||
|- | |||
! Gas flow (sccm) | |||
| SF<sub>6</sub> 350 (1.5 s) 550 | |||
| C<sub>4</sub>F<sub>8</sub> 200 | |||
| SF<sub>6</sub> 350 (1.5 s) 550 | |||
| C<sub>4</sub>F<sub>8</sub> 200 | |||
|- | |||
! Cycle time (secs) | |||
| 7.0 | |||
| 4.0 | |||
| 7.0 | |||
| 4.0 | |||
|- | |||
! Pressure (mtorr) | |||
| 25 (1.5 s) 90 >> 150 | |||
| 25 | |||
| 25 (1.5 s) 150 | |||
| 25 | |||
|- | |||
! Coil power (W) | |||
| 2800 | |||
| 2000 | |||
| 2800 | |||
| 2000 | |||
|- | |||
! Platen power (W) | |||
| 120 >> 140 (1.5) 45 | |||
| 0 | |||
| 140 (1.5) 45 | |||
| 0 | |||
|- | |||
! Cycles | |||
| colspan="2" | 11 (keep fixed) | |||
| colspan="2" | 44 (vary this) | |||
|- | |||
! Common | |||
| colspan="4" | Temperature 20 degs, HBC 10 torr, Short funnel, with baffle & 5mm spacers | |||
|} | |||