Specific Process Knowledge/Etch/DRIE-Pegasus: Difference between revisions

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	== Process information ==		== Process information ==

			Describing a process recipe on the Pegasus may sometimes be difficult because of the great flexibility of the instrument. A compact and precise notation is therefore required for the recipes. Click [[Specific_Process_Knowledge/Etch/DRIE-Pegasus/Notation\|here]] to find a short description of the official SPTS notation.