Specific Process Knowledge/Etch/ASE (Advanced Silicon Etch): Difference between revisions
| Line 17: | Line 17: | ||
==An overview of the performance of the ASE and some process related parameters== | ==An overview of the performance of the ASE and some process related parameters== | ||
{| border="2" cellspacing="0" cellpadding=" | {| border="2" cellspacing="0" cellpadding="2" | ||
|- | |- | ||
!style="background:silver; color:black;" align="left"|Purpose | !style="background:silver; color:black;" align="left"|Purpose | ||