Specific Process Knowledge/Etch/IBE⁄IBSD Ionfab 300/IBE magnetic stack etch: Difference between revisions
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==Results of Design of Experiments optimization of magnetic stack etching== | ==Results of Design of Experiments optimization of magnetic stack etching ([mailto:kristian.rasmussen@nanotech.dtu.dk Kristian Hagsted Rasmussen] spring 2011)== | ||
===Process parameters=== | ===Process parameters=== | ||