Specific Process Knowledge/Etch/IBE⁄IBSD Ionfab 300/IBE magnetic stack etch: Difference between revisions
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==Results of Design of Experiments optimization of magnetic stack etching== | ==Results of Design of Experiments optimization of magnetic stack etching== | ||
===Process parameters | ===Process parameters=== | ||
To find the optimal parameters, Design of Experiments was applied with the intervals shown on the figure below. The final optimized recipe is listed in the table. | To find the optimal parameters, Design of Experiments was applied with the intervals shown on the figure below. The final optimized recipe is listed in the table. | ||
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