Specific Process Knowledge/Etch/IBE⁄IBSD Ionfab 300/IBE Si etch: Difference between revisions
| Line 38: | Line 38: | ||
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|Etch rate [nm/min] | |Etch rate [nm/min] | ||
|18 | |17-18 | ||
|} | |} | ||
| Line 38: | Line 38: | ||
|- | |- | ||
|Etch rate [nm/min] | |Etch rate [nm/min] | ||
|18 | |17-18 | ||
|} | |} | ||