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Specific Process Knowledge/Etch/Etching of Titanium: Difference between revisions

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|'''Chemical solution'''
|'''Chemical solution'''
|HF:NH<math>_4</math>F   
|HF:NH<sub>4</sub>F   
|NH<math>_3</math>OH:H<math>_2</math>O<math>_2</math>:H<math>_2</math>O - 1:1:5
|NH<sub>3</sub>OH:H<sub>2</sub>O<sub>2</sub>:H<sub>2</sub>O - 1:1:5
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|'''Process temperature'''
|'''Process temperature'''
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== Dry etching of titanium ==
== Dry etching of titanium ==


See the [[Specific Process Knowledge/Etch/ICP Metal Etcher|ICP Metal Etch]] page.
See the [[Specific Process Knowledge/Etch/ICP Metal Etcher|ICP Metal Etch]] page.
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