Specific Process Knowledge/Characterization/Topographic measurement: Difference between revisions
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|Substrate size | |Substrate size | ||
|4" or less | |4" or less | ||
| | |8" or less | ||
|6" or less | |6" or less | ||
|- | |- | ||
|Max. scan range xy | |Max. scan range xy | ||
|Line scan x: Full substrate size | |Line scan x: Full substrate size | ||
|Line scan x: | |Line scan x: 50µm to 200mm | ||
|90 µm square | |90 µm square | ||
|- | |- | ||
|Max. scan range z | |Max. scan range z | ||
| | | | ||
| | |50Å to 262µm | ||
|1 µm (can go up to 5 µm under special settings) | |1 µm (can go up to 5 µm under special settings) | ||
|- | |- | ||
| Line 54: | Line 54: | ||
|Tip radius | |Tip radius | ||
| | | | ||
| | |5 µm | ||
|<12 nm on standard cantilever | |<12 nm on standard cantilever | ||
|- | |- | ||
|} | |} | ||